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ISBN:9781467353205

2atomic force microscopy 2control system synthesis 2electrostatic actuators 2nanopositioning 1bending 1bridge circuits 1cooling 1dexterous manipulators 1displacement measurement 1elastic constants 1electric impedance 1force measurement 1force sensors 1physical instrumentation control 1piezoelectric actuators 1power electronics 1silicon-on-insulator 1thermal analysis

2Moheimani, S. O. R. 1Fleming, Andrew J. 1Maroufi, M. 1Moheimani, S. O. Reza 1Piriyanont, Busara 1Wadikhaye, S. P. 1Yong, Y. K. 1Yong, Yuen Kuan

Facets

2atomic force microscopy 2control system synthesis 2electrostatic actuators 2nanopositioning 1bending 1bridge circuits 1cooling 1dexterous manipulators 1displacement measurement 1elastic constants 1electric impedance 1force measurement 1force sensors 1physical instrumentation control 1piezoelectric actuators 1power electronics 1silicon-on-insulator 1thermal analysis

2Moheimani, S. O. R. 1Fleming, Andrew J. 1Maroufi, M. 1Moheimani, S. O. Reza 1Piriyanont, Busara 1Wadikhaye, S. P. 1Yong, Y. K. 1Yong, Yuen Kuan

Title
Creator
Date

Design, fabrication and characterization of a high-bandwidth 2DOF MEMS nanopositioner

- Maroufi, M., Moheimani, S. O. R.

Creator: Maroufi, M. , Moheimani, S. O. R.
Resource Type: conference paper
Date: 2013

Design, modeling, and characterization of a MEMS micro-gripper with an integrated electrothermal force sensor

- Piriyanont, Busara, Moheimani, S. O. Reza

Creator: Piriyanont, Busara , Moheimani, S. O. Reza
Resource Type: conference paper
Date: 2013

Nanopositioner design using tapered flexures: a parametric study

- Wadikhaye, S. P., Yong, Y. K., Moheimani, S. O. R.

Creator: Wadikhaye, S. P. , Yong, Y. K. , Moheimani, S. O. R.
Resource Type: conference paper
Date: 2013

Thermal analysis of piezoelectric benders with laminated power electronics

- Fleming, Andrew J., Yong, Yuen Kuan

Creator: Fleming, Andrew J. , Yong, Yuen Kuan
Resource Type: conference paper
Date: 2013

1

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